High Duty Cycle, high power operation 24/7

Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s proprietary exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical stability and precise control of laser operating parameters.  The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*). With exciPure™  technology, patent pending, LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological  breakthrough leads to dramatically less cost to run your laser.  EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance. Easy to use, simple to service and economical to operate, IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest up-time in the market today. The marking of ceramics shown above is one of many applications for these versatile industrial tools.

  • Specifications

    Wavelength 193nm ArF 248nm KrF 308 XeCl 351 XeF
    Maximum Pulse Energy (mJ) IPEX-840 230 450 300 275
    Maximum Pulse Energy (mJ) IPEX-860 250 700 600 350
    Stabilized Pulse Energy (mJ) IPEX-840 150 400 250 225
    Stabilized Pulse Energy (mJ) IPEX-860 200 600 500 300
    Stabilized Average Power (W)
            IPEX-848 30 80 50 45
            IPEX-846 15 40 25 22
            IPEX-844 7.5 20 12 11
            IPEX-842 3.7 10 6 5.5
            IPEX-868 20 60 50 30
            IPEX-866 10 30 25 15
            IPEX-864 6 18 10 9
            IPEX-862 3 9 5 4.5
    Maximum Repetition Rate (Hz)
            IPEX-846 200 200 200 200
            IPEX-846 100 100 100 100
            IPEX-844 50 50 50 50
            IPEX-842 25 25 25 25
            IPEX-868 100 100 100 100
            IPEX-866 50 50 50 50
            IPEX-864 30 30 20 30
            IPEX-862 15 15 10 15
    • Pulse Duration: 12 to 20 ns FWHM
    • Energy Stability, 1 Sigma: 1% (KrF)
    • Beam Dimensions (mm) (V x H): IPEX-740 Series 12 x 26
    • Beam Dimensions (mm) (V x H): IPEX-760 Series 12 x 28
    • Beam Divergence (mrad) (V x H):  1 x 3 or can be reduced to 0.25mrad with high brightness unstable resonator optics
    • Electrical Power Requirements: Single Phase, 200 - 240 V 50/60Hz; 8x6:2.5kW, 8x4:1.5kW. 8x2:1kW 
    • Cooling Requirements: Optional air cooling to 25Hz operation, water cooling at higher rep rates
    • Laser Gas: Premix or individual cylinders
    • Weight: 8x8 models 400kg , 8x6/8x4/8x2 models: 380kg

  • Features

    • exciPure™  technology for incredible 10X gas lifetimes and the lowest cost of operation
    • No expensive cryogenic gas purifier is required
    • EasyClean automated optics seals to retain gas fill and reduce downtime during
      optics maintenance 
    • Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
    • High-stability optics mounts for ultimate beam pointing accuracy 
    • Simple integration into industrial processing systems

    Benefits

    • Extended gas lifetime, long replacement intervals, low operating cost
    • Simplifies optical maintenance, retains gas fill and passivation
    • Delivers 200 microradian pointing stability
    • No realignment required after cleaning or replacing optics
    • Fast, precise energy stabilization in internal, burst and external trigger modes
    • Excellent energy stability, better than 1.0% (KrF)
    • Removes particulates and maintains optics cleanliness
  • Applications

    • 24/ 7 Pulsed Laser Deposition
    • Precision Manufacturing
    • Material Processing
    • Drilling
    • Wire Stripping
    • Scientific Research
    • LIDAR
    • Laser Induced Breakdown Spectroscopy

    See Laser Applications for more details

SPECIFICATIONS

Download the IPEX 800 Series datasheets

THE IPEX 800 SERIES

Performance, and 24/7reliability

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Laser Applications

Check out our laser applications section for information about a wide variety of laser applications from wire stripping to pulsed laser deposition.

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