High Duty Cycle, high power operation 24/7 with ultra low gas usage
Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance. Incorporating LightMachinery’s patented exciPure™ technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical stability and precise control of laser operating parameters. The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*). With exciPure™ technology, patent pending, LightMachinery has achieved a 10X improvement in gas usage over competing lasers. This technological breakthrough leads to dramatically less cost to run your laser. EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill to be retained while resonator optics are removed for cleaning and maintenance. Easy to use, simple to service and economical to operate, IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today. The marking of ceramics shown above is one of many applications for these versatile industrial tools.
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Specifications
Wavelength 193nm ArF 248nm KrF 308 XeCl 351 XeF Maximum Pulse Energy (mJ) IPEX-840 230 450 300 275 Maximum Pulse Energy (mJ) IPEX-860 250 700 600 350 Stabilized Pulse Energy (mJ) IPEX-840 150 400 250 225 Stabilized Pulse Energy (mJ) IPEX-860 200 600 500 300 Stabilized Average Power (W) IPEX-848 30 80 50 45 IPEX-846 15 40 25 22 IPEX-844 6.0 20 12 11 IPEX-842 3.0 10 6.0 5.5 IPEX-868 20 60 50 30 IPEX-866 10 30 25 15 IPEX-864 5.0 18 10 9 IPEX-862 2.5 9.0 5.0 4.5 Maximum Repetition Rate (Hz) IPEX-848 200 200 200 200 IPEX-846 100 100 100 100 IPEX-844 40 50 50 50 IPEX-842 20 25 25 25 IPEX-868 100 100 100 100 IPEX-866 50 50 50 50 IPEX-864 25 30 20 30 IPEX-862 12 15 10 15 - Pulse Duration: 12 to 20 ns FWHM
- Energy Stability, 1 Sigma: 1% (KrF)
- Beam Dimensions (mm) (V x H): IPEX-840 Series 12 x 26
- Beam Dimensions (mm) (V x H): IPEX-860 Series 12 x 28
- Beam Divergence (mrad) (V x H): 1 x 3 or can be reduced to 0.25mrad with high brightness unstable resonator optics
- Electrical Power Requirements: Single Phase, 200 - 240 V 50/60Hz; 8x6:2.5kW, 8x4:1.5kW. 8x2:1kW
- Cooling Requirements: Optional air cooling to 25Hz operation, water cooling at higher rep rates
- Laser Gas: Premix or individual cylinders
- Weight: 8x8 models 400kg , 8x6/8x4/8x2 models: 380kg
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Features
- exciPure™ technology for incredible 10X gas lifetimes and the lowest cost of operation
- No expensive cryogenic gas purifier is required
- EasyClean automated optics seals to retain gas fill and reduce downtime during
optics maintenance - Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
- High-stability optics mounts for ultimate beam pointing accuracy
- Simple integration into industrial processing systems
Benefits
- Extended gas lifetime, long replacement intervals, low operating cost
- Simplifies optical maintenance, retains gas fill and passivation
- Delivers 200 microradian pointing stability
- No realignment required after cleaning or replacing optics
- Fast, precise energy stabilization in internal, burst and external trigger modes
- Excellent energy stability, better than 1.0% (KrF)
- Removes particulates and maintains optics cleanliness
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Applications
- 24/ 7 Pulsed Laser Deposition
- Precision Manufacturing
- Material Processing
- Drilling
- Wire Stripping
- Scientific Research
- LIDAR
- Laser Induced Breakdown Spectroscopy
SPECIFICATIONS
Download the IPEX 800 Series datasheets
THE IPEX 800 SERIES
Performance, and 24/7 reliability
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Laser Applications
Check out our laser applications section for information about a wide variety of laser applications from wire stripping to pulsed laser deposition.
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