Excimer Lasers for Precision Micromachining and Advanced Research

High-energy deep-UV excimer lasers with superior edge quality and minimal heat-affected zones.

IPEX-700 IPEX-800 IPEX-500

LightMachinery’s excimer lasers deliver short, high-energy UV pulses at 193–351 nm for applications that demand the ultimate in precision. With our IPEX Series, customers benefit from clean material interaction, mask projection capability, and edge definition unmatched by other UV technologies. From micromachining and semiconductor processing to biomedical research, excimer lasers remain the gold standard for UV materials processing.

IPEX Series Excimer Lasers

The IPEX Series combines decades of engineering expertise with breakthrough innovations such as exciPure™ gas technology, delivering up to 10× longer gas lifetimes and dramatically lower operating costs. Whether for 24/7 production or research environments, the IPEX family provides reliable, stable excimer performance.

IPEX-800: Heavy-duty excimer laser for industrial manufacturing with high-duty cycle capability and superior stability.
IPEX-700: Versatile excimer laser for R&D and medium-volume production, compact yet powerful.
IPEX-500: Budget-friendly excimer laser designed for laboratories and sporadic use, with an ultra-compact footprint.

Why Choose Excimer?

Excimer lasers offer unmatched advantages over other UV laser technologies:

Deep-UV wavelengths (193–351 nm) for optimal absorption in polymers, ceramics, and semiconductors
Mask projection for cost-effective parallel processing
Minimal heat-affected zones and superior edge quality
High throughput for large-area or high-density feature applications

Applications

LightMachinery excimer lasers are trusted worldwide for:

Medical Devices: Stent cutting, catheter processing, bioabsorbable materials
Semiconductors & Electronics: Via drilling, wire stripping, PCB processing
Advanced Materials: Pulsed laser deposition (PLD) for thin films
LIDAR: Reliable atmospheric monitoring in harsh environments

Process Support

Our applications laboratory provides complimentary sample processing with excimer and CO₂ lasers to help customers determine the optimal wavelength, pulse duration, and energy parameters for their work.

LIGHTMACHINERY EXCIMER LASERS

Plasma generated during excimer laser based pulsed laser deposition

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An excellent example of the quality and precision achieved by the excimer laser drilling plastic. This is 75 micron thick polyimide with 50 micron diameter holes.

Atmospheric monitoring LIDAR station in Canada's far north utilizes a LightMachinery IPEX excimer laser, it is a location where reliability is paramount

Wire stripping and hole drilling in a catheter using an IPEX excimer laser

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Very precise stripping from gold contact pads using an IPEX laser with a highly specialized Offner projection lens to pattern around a dozen devices in one go, with step & repeat for rows of devices. Edges are precise to <1.5µm, and note lack of debris using Coax He nozzle.

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Ceramic chip capacitor marking, very small character sizes, high throughput, good contrast on most ceramics. Excimer marking is normally integrated into an automated test handler.

Fibre location grooves machined in PMMA using a PM848 at 193nm. Credit to Kris Naessens of INTEC for the photo

Aerospace wire marking for Tefzel and Teflon wire. The excimer laser marks are high contrast permanent marks that cannot be removed with solvents. No reduction in insulation strength.

Learn More!

IPEX-800

Learn all about the versatile and reliable IPEX-800 Excimer laser

IPEX-700

Laser Applications

Check out our laser applications section for information about a wide variety of laser applications from wire stripping to pulsed laser deposition.

Parts, Service and Support

Parts, Service and Support - this is where we really shine!