IPEX-500 Excimers for Research
IPEX-500 Series lasers are designed for medium-power excimer applications primarily in the scientific research community. They deliver dependable performance at budget-friendly cost.
exciPure™ technology combines improved materials, a new dual-stage filter that removes both particulate and gaseous contaminants, and an improved stabilization algorithm.
EasyClean-2 valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill to be retained while resonator optics are removed for cleaning and maintenance. This feature significantly reduces operating costs by preventing de-passivation of the laser chamber and avoids any safety hazard of residual halogen gas being vented to the workplace.
Simple to use
- PC based operator interface
- Optional air-cooled models for operation to 25 Hz
- Premix or individual gas cylinders
- Single phase electrical power
- Integral oil-free vacuum pump
- Single-sided service access and economical to operate
IPEX-500 lasers pair uncompromising performance and industry-leading uptime with the lowest total cost of ownership. An investment that lets you stretch your science – not your budget.
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Specifications
Wavelength 193nm ArF 248nm KrF 308 XeCl 351 XeF Maximum Pulse Energy (mJ) IPEX-540 230 475 300 275 Maximum Pulse Energy (mJ) IPEX-560 250 700 600 350 Stabilized Pulse Energy (mJ) IPEX-540 150 400 250 225 Stabilized Pulse Energy (mJ) IPEX-560 200 600 500 300 Stabilized Average Power (W) IPEX-546 15 40 25 22 IPEX-544 7.5 20 12 11 IPEX-542 3.7 10 6 5.5 IPEX-566 10 30 25 15 IPEX-564 6 18 10 9 IPEX-562 3 9 5 4.5 Maximum Repetition Rate (Hz) IPEX-546 100 100 100 100 IPEX-544 50 50 50 50 IPEX-542 25 25 25 25 IPEX-566 50 50 50 50 IPEX-564 30 30 20 30 IPEX-562 15 15 10 15 - Pulse Duration: 12 to 20 ns FWHM
- Energy Stability, 1 Sigma: 1% (KrF)
- Beam Dimensions (mm) (V x H): IPEX-540 Series 12 x 26
- Beam Dimensions (mm) (V x H): IPEX-560 Series 12 x 28
- Beam Divergence (mrad) (V x H): 1 x 3 or can be reduced to 0.25mrad with high brightness unstable resonator optics
- Electrical Power Requirements: Single Phase, 200 - 240 V 50/60Hz
- Cooling Requirements: Optional air cooling to 25Hz operation, water cooling at higher rep rates
- Laser Gas: Premix or individual cylinders
- Weight: 295kg (650lbs)
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Features
- exciPure™ technology for incredible 10X gas lifetimes and the lowest cost of operation
- No expensive cryogenic gas purifier is required
- EasyClean-2 automated optics seals to retain gas fill and reduce downtime during
optics maintenance - Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
- High-stability optics mounts for ultimate beam pointing accuracy
- Simple integration into lab setups
- PC based remote control
Benefits
- Massive dynamic gas lifetime, low operating cost
- Simplifies optical maintenance, retains gas fill and passivation
- Delivers 200 microradian pointing stability
- No realignment required after cleaning or replacing optics
- Fast, precise energy stabilization in internal, burst and external trigger modes
- Excellent energy stability, better than 1.0% (KrF)
- Removes particulates and maintains optics cleanliness
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Applications
- Pulsed Laser Deposition
- Precision Manufacturing
- Material Processing
- Drilling
- Wire Stripping
- Scientific Research
- LIDAR
- Laser Induced Breakdown Spectroscopy
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Drawing
SPECIFICATIONS
Download the IPEX 500 Series Datasheet
Learn More!
Laser Applications
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